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Epitaxy Equipment Product List

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Molecular Beam Epitaxy (MBE) device

Molecular Beam Epitaxy (MBE) device

This is an MBE device compatible with compact sizes (1 inch to 2 inches).

●Features This device uses a vacuum deposition method to heat a substrate placed in ultra-high vacuum below 10^-8 Pa and independently supplies the raw materials to be deposited on the substrate to grow crystals on the substrate. It includes a solid source MBE device that uses solid materials for evaporation through a molecular beam deposition source (Knudsen cell) and a gas source MBE device that uses gases or organometallic compounds as raw materials.

  • Vacuum Equipment
  • Semiconductor inspection/test equipment
  • Evaporation Equipment
  • Epitaxy Equipment

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RIBER Corporation Molecular Beam Epitaxy (MBE) System

RIBER Corporation Molecular Beam Epitaxy (MBE) System

The passivation MBE device is composed of various chambers specially designed for laser facet passivation and other purposes.

The passivation MBE (Molecular Beam Epitaxy) system consists of various chambers specially designed for surface passivation or laser facet passivation. It is possible to use various coatings to protect the surfaces and facet surfaces, with typical materials including ZnSe, SiN, and oxides. As an example of configuration, it may include a chamber that features the ability to invert the device holder at both ends of the laser for cleaning and passivation, as well as a hydrogen (H2) plasma cleaning chamber for removing the natural oxide layer before the passivation film. The wafers move from chamber to chamber under high vacuum conditions, maintaining cleanliness throughout the entire process. Additional process chambers can be added according to customer requirements and process time.

  • Evaporation Equipment
  • CVD Equipment
  • Epitaxy Equipment

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